Nanomagnetism & Oxides Laboratory
The LNO possess tools for GMR and TMR deposition and annealing. They are part of a commun lab with Crivasense company.

- a semi industrial sputtering Rotaris (Singulus) with 10 targets homogeneous (<5% R change on TMR) on a 200mm wafer

- an indutrial oven Futek, homogeneous on 200mm wafers - 1T, 600°C, under vaccum.